JPH0323548Y2 - - Google Patents

Info

Publication number
JPH0323548Y2
JPH0323548Y2 JP1981089485U JP8948581U JPH0323548Y2 JP H0323548 Y2 JPH0323548 Y2 JP H0323548Y2 JP 1981089485 U JP1981089485 U JP 1981089485U JP 8948581 U JP8948581 U JP 8948581U JP H0323548 Y2 JPH0323548 Y2 JP H0323548Y2
Authority
JP
Japan
Prior art keywords
contact
temperature
measuring element
temperature measuring
detection end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981089485U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57201940U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981089485U priority Critical patent/JPH0323548Y2/ja
Publication of JPS57201940U publication Critical patent/JPS57201940U/ja
Application granted granted Critical
Publication of JPH0323548Y2 publication Critical patent/JPH0323548Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
JP1981089485U 1981-06-19 1981-06-19 Expired JPH0323548Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981089485U JPH0323548Y2 (en]) 1981-06-19 1981-06-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981089485U JPH0323548Y2 (en]) 1981-06-19 1981-06-19

Publications (2)

Publication Number Publication Date
JPS57201940U JPS57201940U (en]) 1982-12-22
JPH0323548Y2 true JPH0323548Y2 (en]) 1991-05-22

Family

ID=29884630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981089485U Expired JPH0323548Y2 (en]) 1981-06-19 1981-06-19

Country Status (1)

Country Link
JP (1) JPH0323548Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60034496T2 (de) * 1999-02-01 2008-01-10 Axcelis Technologies, Inc., Beverly Kontakt-Temperatursensor mit thermischer Entkopplung zwischen Sensorkopf und Hitzeschild der elektrischen Zuleitungen

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502038U (en]) * 1973-05-02 1975-01-10
JPS5462877A (en) * 1977-10-28 1979-05-21 Nippon Kontorooraa Seisakushiy Surface thermometer

Also Published As

Publication number Publication date
JPS57201940U (en]) 1982-12-22

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